● Adopting the classic cross table structure, the Z axis is independent, ensuring the high precision of the equipment;
● All three axes adopt the "dovetail" guide rail structure, and the precision preload air-floating guide rail ensures the precision stability of the equipment;
● All three axes are made of granite material, which improves the precision stability of the equipment;
● Adopting the ball screw drive with increased flexibility to ensure sufficient driving force and reduce errors;
● ≤0.05μm grating scale resolution provides precision measurement for the equipment;
● The integrated protective cover with constant temperature function makes the equipment have higher precision in different external environments;
● Supports a variety of probe systems.
model |
Measuring range( mm) |
Resolution(μm) |
Indication error E(μm) |
Maximum load-bearing capacity of workbench (kg) |
Machine weight (kg) |
||
Dx |
Dy |
Dz |
|||||
Primus-HS 422 |
400 |
200 |
200 |
0.02 |
0.5+L/1000起 |
20 |
600 |